VIDEO:
30 SECOND
PART BUILDER
EXPLAINED
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- High Vacuum
- Angle and In-line Valves
- XL
- XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Air pressure applied to pilot port shifts piston-coupled valve
- Replaceable bellows reduces maintenance cost and waste material
- Additional maintenance parts available to extend useful life of valve
- Standard FKM seals, plus 8 additional seal compound options
- Auto switches mountable from 4 directions
- Optional 100°C and 150°C heaters (UL compliant lead wire)
How to order
Flange side
Rear flange surface
Left flange surface
Right flange surface
How to Order
q w e r t y u
XLA 2 M9N16 A
RoHS
XLA/XLAV Series
Aluminum
High Vacuum Angle Valve
Normally Closed, Bellows Seal
t Auto switch type
w Flange type
XLA
q Flange size
y
Number of auto switches/Mounting position
r Temperature specifications/Heater
u Body surface treatment/Seal material and changed parts
•฀Seal฀material
*1 Produced by Mitsubishi Cable Industries, Ltd.
•฀Body฀surface฀treatment
Barrel Perfluoro
®
is a registered trademark of Matsumura Oil Co., Ltd.
Kalrez
®
is a registered trademark of E. I. du Pont de Nemours and
Company or its affiliates.
Chemraz
®
is a registered trademark of Greene, Tweed Technologies,
Inc.
* Size 16 is not applicable to H4, H5. Size 25 is not applicable to H4.
* Heater cannot be retrofitted for the H0 type.
e Indicator/Pilot port direction
* For the high-temperature type, select the heat-resistant auto switch.
(Refer to page 18.)
* Standard lead wire length is 0.5 m. Add M to the end of the part number for 1
m, L for 3 m, and Z for 5 m.
Example) -2M9NL
•฀Part฀with฀changed฀seal฀material฀and฀leakage
To order something other than Nil (standard), list the symbols start-
ing with X, followed by each symbol for body surface treatment, seal
material, and then changed part.
Example) XLA-16-2M9NA-
XAN1A
*1
Values at normal temperature, excluding gas permeation
*2 Refer to Construction on page 5 for changed part. Number corresponds with
the parts number on the construction drawing.
Symbol
*
2
Changed
part
Leakage [Pa· m
3
/s or less]
*
1
Internal External
Nil
None 1.3 x 10
−10
(FKM) 1.3 x 10
−11
(FKM)
A
w
, e, r
1.3 x 10
−8
1.3 x 10
−9
B
w
, e
1.3 x 10
−8
1.3 x 10
−9
C
r
1.3 x 10
−10
(FKM) 1.3 x 10
−9
D
w
1.3 x 10
−8
1.3 x 10
−11
(FKM)
E
w
, r
1.3 x 10
−8
1.3 x 10
−9
Symbol
Indicator Pilot port direction
Nil
Without indicator
Flange side
A
With
indicator
Flange side
F
Left flange surface
G
Rear flange surface
J
Right flange surface
K
Without
indicator
Left flange surface
L
Rear flange surface
M
Right flange surface
Symbol Surface treatment
Nil
External: Hard anodized Internal: Raw material
A
External: Hard anodized Internal: Oxalic acid anodized
Symbol Seal material Compound no.
Nil
FKM 1349-80
*
1
N1
EPDM 2101-80
*
1
P1
Barrel Perfluoro
®
70W
Q1
Kalrez
®
4079
R1
Chemraz
®
SS592
R2
SS630
R3
SSE38
S1
VMQ 1232-70
*
1
T1
FKM for Plasma 3310-75
*
1
Symbol Temperature Heater
Nil
5 to 60°C —
High-
temperature
type
H0
5 to 150°C
—
H4
With 100°C heater
H5
With 120°C heater
Symbol Quantity Mounting position
Nil
Without auto switch —
A
2 Valve open/closed
B
1 Valve open
C
1 Valve closed
Size
16
25
40
50
63
80
Symbol
Type Applicable flange size
Nil
KF (NW) 16, 25, 40, 50, 63, 80
D
K (DN) 63, 80
Symbol Model Remarks
Nil
—
Without auto switch (without magnet)
M9N(M)(L)(Z)
D-M9N(M)(L)(Z)
Solid state auto switch
M9P(M)(L)(Z)
D-M9P(M)(L)(Z)
M9B(M)(L)(Z)
D-M9B(M)(L)(Z)
A90(L)
D-A90(L)
Reed auto switch (Not applicable
to flange size 16)
A93(M)(L)(Z)
D-A93(M)(L)(Z)
M9//
— Without auto switch (with magnet)
3
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