Specifications (For details, please consult our “Product Specifications” information.)
How to Order
®
SEMI
Thermo-chiller
Series HRW
Fluorinated Fluid Type
002 HHRW
Fluorinated Fluid Type
Symbol
002
008
015
030
Cooling capacity
2 kW
8 kW
15 kW
30 kW
Cooling capacity
Temperature range setting
Temperature range setting
68 to 194°F (20 to 90°C)
Symbol
H
Pump inverter control
None
Applicable (Pump inverter type)
Symbol
Nil
S
Pump inverter control
Option
None
Analog communication
DeviceNet communication
NPT fitting
Circulating fluid automatic recovery
Symbol
Nil
C
D
N
Z
Option
Water-cooled
Temperature: 50 to 95°F (10 to 35°C), Humidity: 30 to 70%RH
Fluorinert
™
FC-40/GALDEN
®
HT200
68 to 194°F (20 to 90°C)
Facility water temperature +27°F (15°C)
50 to 95°F (10 to 35°C)
±0.54°F (±0.3°C)
3.2 gal (12 L)
Rc3/4
Copper brazing (Heat exchanger), Stainless steel, EPDM, Silicone, PPS, Fluororesin
50 to 95°F (10 to 35°C)
44 to 102 psi (0.3 to 0.7 MPa)
Rc3/4
Copper brazing (Heat exchanger), Stainless steel, EPDM, Silicone, Bronze, Brass
3-phase 200/200 to 208 VAC ±10%
26
30
Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin)
W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm)
UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95)
Model
Cooling method
Ambient temperature/humidity
Note 1)
Dimensions
Note 9)
Weight
Note 10)
Safety standards
Circulating fluid
Note 2)
Temperature range setting
Note 1)
Cooling capacity (50/60 Hz common) (kW)
Temperature stability
Note 3)
Pump capacity
Note 4)
(50/60 Hz)(MPa)
Circulating fluid flow range
Note 5)
(L/min)
Tank capacity
Note 6)
Circulating fluid recovery tank volume
Note 7)
Port size
Wetted parts material
Temperature range
Required flow rate
Note 8)
Inlet pressure range
Port size
Wetted parts material
Power supply
Max. operating current (A)
Breaker capacity (A)
Communications
Circulating fluid temperature
Facility water temperature
Circulating fluid rated flow
Facility water required flow rate
2 8 15 29
2.6 gpm (10 L/min) 5.3 gpm (20 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min)
1.1 gpm (4 L/min)
2.6 gpm (10 L/min)
0.40/0.60 (at 4 L/min)
0.8 to 4.2 gpm (3 to 16 L/min)
Approx. 3.4 gal (13 L) Approx. 3.7 gal (14 L)
7.9 gpm (30 L/min)
5.3 gpm (20 L/min)
0.45/0.65 (at 30 L/min)
10.6 gpm (40 L/min)
6.6 gpm (25 L/min)
0.40/0.60 (at 40 L/min)
2.4 to 13.2 gpm (9 to 50 L/min)
Approx. 220 lbs (100 kg)Approx. 198 lbs (90 kg)
10.6 gpm (40 L/min)
10.6 gpm (40 L/min)
0.40/0.60 (at 40 L/min)
Circulating fluid system
Facility water
system
Electrical
system
Conditions
HRW002-H
HRW002-HS
HRW008-H
HRW008-HS
HRW015-H
HRW015-HS
HRW030-H
HRW030-HS
Note 1) It should have no condensation.
Note 2) Fluorinert
™
is a trademark of 3M and GALDEN
®
is a registered trademark of Solvay Solexis,
Inc. Regarding the fluid other than the above, please contact SMC.
Note 3) Outlet temperature when the circulating fluid and facility water are rated flow, and the
circulating fluid outlet and return port are directly connected. Installation environment, power
supply, and facility water are within specification range and stable. Value obtained 10 minutes
after the external load is stabilized. It may be out of ±0.54°F (±0.3°C) in some other operating
conditions.
Note 4) The capacity at the circulating fluid outlet when the circulating fluid temperature is 68°F
(20°C). Pump capacity at 60 Hz indicates the maximum capacity of the HRW
lll-HS
(pump inverter type).
Note 5) Applicable to the HRW
lll-HS (pump inverter type) only.
Note 6) Minimum volume required for operating only the Thermo-chiller. (Circulating fluid
temperature: 68°F (20°C), including the Thermo-chiller’s internal pipings or heat
exchanger)
Note 7) The automatic circulating fluid recovering function will be provided by selecting option Z
for collecting the circulating fluid inside an external piping.
Note 8)
Required flow rate for cooling capacity or maintaining the temperature stability.
Note 9) Panel dimensions. These dimensions do not include possible protrusions such as a
breaker handle.
Note 10
) Weight in the dry state without circulating fluids
108
