VIDEO:
30 SECOND
PART BUILDER
EXPLAINED
XLH, High Vacuum Manual Angle Valve, Bellows Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- High vacuum angle valve
- Type: manual, bellows seal
- Flange size: 16 ~ 50
- Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
- Auto switches not available
How to order
Flange side
Rear flange surface
Left flange surface
Right flange surface
How to Order
q w e r t y u
XLA 2 M9N16 A
RoHS
XLA/XLAV Series
Aluminum
High Vacuum Angle Valve
Normally Closed, Bellows Seal
t Auto switch type
w Flange type
XLA
q Flange size
y
Number of auto switches/Mounting position
r Temperature specifications/Heater
u Body surface treatment/Seal material and changed parts
•Sealmaterial
*1 Produced by Mitsubishi Cable Industries, Ltd.
•Bodysurfacetreatment
Barrel Perfluoro
®
is a registered trademark of Matsumura Oil Co., Ltd.
Kalrez
®
is a registered trademark of E. I. du Pont de Nemours and
Company or its affiliates.
Chemraz
®
is a registered trademark of Greene, Tweed Technologies,
Inc.
* Size 16 is not applicable to H4, H5. Size 25 is not applicable to H4.
* Heater cannot be retrofitted for the H0 type.
e Indicator/Pilot port direction
* For the high-temperature type, select the heat-resistant auto switch.
(Refer to page 18.)
* Standard lead wire length is 0.5 m. Add M to the end of the part number for 1
m, L for 3 m, and Z for 5 m.
Example) -2M9NL
•Partwithchangedsealmaterialandleakage
To order something other than Nil (standard), list the symbols start-
ing with X, followed by each symbol for body surface treatment, seal
material, and then changed part.
Example) XLA-16-2M9NA-
XAN1A
*1
Values at normal temperature, excluding gas permeation
*2 Refer to Construction on page 5 for changed part. Number corresponds with
the parts number on the construction drawing.
Symbol
*
2
Changed
part
Leakage [Pa· m
3
/s or less]
*
1
Internal External
Nil
None 1.3 x 10
−10
(FKM) 1.3 x 10
−11
(FKM)
A
w
, e, r
1.3 x 10
−8
1.3 x 10
−9
B
w
, e
1.3 x 10
−8
1.3 x 10
−9
C
r
1.3 x 10
−10
(FKM) 1.3 x 10
−9
D
w
1.3 x 10
−8
1.3 x 10
−11
(FKM)
E
w
, r
1.3 x 10
−8
1.3 x 10
−9
Symbol
Indicator Pilot port direction
Nil
Without indicator
Flange side
A
With
indicator
Flange side
F
Left flange surface
G
Rear flange surface
J
Right flange surface
K
Without
indicator
Left flange surface
L
Rear flange surface
M
Right flange surface
Symbol Surface treatment
Nil
External: Hard anodized Internal: Raw material
A
External: Hard anodized Internal: Oxalic acid anodized
Symbol Seal material Compound no.
Nil
FKM 1349-80
*
1
N1
EPDM 2101-80
*
1
P1
Barrel Perfluoro
®
70W
Q1
Kalrez
®
4079
R1
Chemraz
®
SS592
R2
SS630
R3
SSE38
S1
VMQ 1232-70
*
1
T1
FKM for Plasma 3310-75
*
1
Symbol Temperature Heater
Nil
5 to 60°C —
High-
temperature
type
H0
5 to 150°C
—
H4
With 100°C heater
H5
With 120°C heater
Symbol Quantity Mounting position
Nil
Without auto switch —
A
2 Valve open/closed
B
1 Valve open
C
1 Valve closed
Size
16
25
40
50
63
80
Symbol
Type Applicable flange size
Nil
KF (NW) 16, 25, 40, 50, 63, 80
D
K (DN) 63, 80
Symbol Model Remarks
Nil
—
Without auto switch (without magnet)
M9N(M)(L)(Z)
D-M9N(M)(L)(Z)
Solid state auto switch
M9P(M)(L)(Z)
D-M9P(M)(L)(Z)
M9B(M)(L)(Z)
D-M9B(M)(L)(Z)
A90(L)
D-A90(L)
Reed auto switch (Not applicable
to flange size 16)
A93(M)(L)(Z)
D-A93(M)(L)(Z)
M9//
— Without auto switch (with magnet)
3
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