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- AP3100, Diaphragm Valve, Manually Operated (High Pressure/Flow)
AP3100, Diaphragm Valve, Manually Operated (High Pressure/Flow)
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
- Suitable for UHP gas supply line
- Body material: 316L SS secondary remelt
- High pressure type: 20.7 MPa and 9 MPa
- Designed for bulk specialty gas (BSGS) delivery
- LOTO standard with AP3157, optional AP3125
How to order
Series AP3100
Manually operated type
(For high pressure and high flow)
Diaphragm Valve for Ultra High Purity
¡Suitable for UHP gas supply line
¡Body material: 316L SS secondary remelt
¡High pressure type: 20.7 MPa and 9 MPa
¡Designed for bulk specialty gas (BSGS) delivery
¡LOTO standard with AP3157, optional AP3125
How to Order
AP31 00 2PW MV8 MV8S
Material
S
H
Body material
316L SS secondary remelt
Ni-Cr-Mo alloy
∗
2)
Code
Surface finish
No code
M
15 µin. (0.4 µm) Standard
10 µin. (0.25 µm)
Code
Connections (Inlet, Outlet)
FV4
MV4
TW6
FV8
MV8
TW8
FV12
MV12
TW12
Connections
1/4 inch face seal (Female)
1/4 inch face seal (Male)
3/8 inch tube weld
1/2 inch face seal (Female)
1/2 inch face seal (Male)
1/2 inch tube weld
3/4 inch face seal (Female)
3/4 inch face seal (Male)
3/4 inch tube weld
Code
Ports
2PW
Ports
2 ports
Code
(Inlet) (Outlet)
Operating Parameters
Gas
Operating pressure
Proof pressure
Burst pressure
Ambient and operating temperature
Cv
∗
3)
Leak rate
Across the seat leak
Surface finish
Connections
Installation
Internal volume
Weight
Knob
Operational Safety Device (OSD)
LOTO (Lockout)
AP3100
0.7
Multi turn round knob (1 1/2 turn)
N/A
AP3102
1.3
Vacuum to 3000 psig
(20.7 MPa)
∗
1)
Vacuum to 1300 psig
(9.0 MPa)
AP3125
Select compatible materials of construction for the gas
4500 psig (31 MPa)
10000 psig (69 MPa)
-40 to 65 °C (No freezing)
∗
2)
2 x 10
-11
Pa·m
3
/sec
2 x 10
-10
Pa·m
3
/sec
∗
4)
4 x 10
-9
Pa·m
3
/sec
∗
4)
Ra max 15 µin. (0.4 µm) Option: 10 µin. (0.25 µm)
Face seal , Tube weld
Bottom mount
0.36 in
3
(6.0 cm
3
)
1.27 kg
∗
5)
AP3150
Vacuum to 1300 psig (9.0 MPa)
1.0
1/4 turn lever knob
∗
6)
Option
(Part number: AP PL227)
∗
9)
Option
(Part number: AP PL225)
∗
9)
1/4 turn round knob
with open/close
indication window
∗
7)
N/A
Pull twist knob
∗
8)
Standard
AP3157
Specifications
Model
00
02
25
50
57
3000 psig (20.7 MPa)
∗
1)
1300 psig (9.0 MPa)
3000 psig (20.7 MPa)
∗
1)
1300 psig (9.0 MPa)
1300 psig (9.0 MPa)
Cv
0.7
1.3
1.0
1.0
1.0
Knob
Multi turn round knob
1/4 turn lever knob
1/4 turn round knob
Pull twist knob with LOTO
Indicator switch
Handle
∗
4)
Code
∗1) 2400 psig (16.5 MPa) for connection size 3/4 inch.
Seat material
No code
VS
Material
PCTFE (Standard)
Polyimide
∗
3)
Code
∗3) Not available with H
material.
∗2) Special export controls apply to
Ni-Cr-Mo alloy body with 1/2
inch or greater size connection.
∗1)
Maximum operating pressure 2400 psig (16.5 MPa) for connection size 3/4 inch.
∗2) -10 to 90 °C for Polyimide seat.
∗3) Figure of 1/2 inch connection.
∗4) Tested with Helium gas inlet pressure 500 psig (3.5 MPa).
∗5)
Weight, including individual boxed weight, may vary depending on connections or options.
∗6) Optional lever color available. Please contact SMC.
∗7) Optional indicator switch available. Please contact SMC.
∗8) Handle must be pulled to turn open from closed.
∗9) Refer to the specification for options. (P.1088)
Maximum operating pressure
Surface finish
Ra max
Inboard leakage
Outboard leakage
Vacuum to 3000 psig
(20.7 MPa)
∗
1)
Option (AP3150 only)
No code
ISH
Specification
—
Code
∗4)
Indication of opened/closed
status.
Indicator Switch (Option) Specification
Code
Output type
Power supply voltage
Output voltage
Supply current
Output current
Cable
Wiring Diagram
BN
+
−
BL
BK
Lead wire
Cable length
Color (Lead wire)
ISH
NPN
3.8 to 30 VDC
Max. 0.4 VDC
Max. 11 mA
Max. 20 mA
AWG 24
3 m
Blue (BL), Brown (BN), Black (BK)
Indicator switch Load
1082
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