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- AZ3542 & AZ4542, Diaphragm Valve, Air Operated
AZ3542 & AZ4542, Diaphragm Valve, Air Operated
Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
- Cleaned for high purity semiconductor applications
- Cleanroom assembled and Helium leaked tested
- Valve meets dimensional requirements of SEMI F36-0299, Option 1
- User-friendly forged body
- M5 actuation port
- Compact and lightweight
How to order
Series AZ3542 & 4542
Air operated type
Diaphragm Valve for Ultra High Purity
Diaphragm
Seat
Body
How to Order
Suitable for UHP gas supply line
Body material: 316L SS
Pneumatically actuated normally closed
Operating Parameters
Status
Gas
Operating pressure
Proof pressure
Burst pressure
Ambient and operating temperature
Cv
Leak rate
Across the seat leak
Surface finish
Connections
Actuation pressure
Actuation port connection
Actuation port location
Installation
Internal volume
Weight
AZ3542
Normally closed (N.C.)
Select compatible materials of construction for the gas
Vacuum to 125 psig (0.9 MPa)
200 psig (1.4 MPa)
375 pisg (2.7 MPa)
-10 to 71°C (No freezing)
2 x 10
-11
Pa·m
3
/s
2 x 10
-10
Pa·m
3
/s
∗1)
4 x 10
-9
Pa·m
3
/s
∗1)
Ra 10µin. (0.25 µm)
Face seal, Tube weld
60 to 110 psig (0.4 to 0.76 MPa)
M5 x 0.8
Top
Bottom mount
0.06 in
3
(1.07 cm
3
)
0.24 kg
∗2)
0.29 0.5
AZ4542
∗1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa).
∗2) Weight for AZ3542S2PMV4MV4 including individual boxed weight. It may vary depending on connections or options.
Specifications
Wetted Parts
Body
Surface finish
Diaphragm
Seat
S
316L SS
Electropolish + Passivation
Ni-Co Alloy
PCTFE (Option: Polyimide)
Wetted Parts Material
MV4
FV4
TW4
MV6
FV6
TW6
TW8
Connections
1/4 inch face seal (Male)
∗
1)
1/4 inch face seal (Female)
1/4 inch tube weld
3/8 inch face seal (Male)
∗1)
3/8 inch face seal (Female)
3/8 inch tube weld
1/2 inch tube weld
Size
Port
AZ3
2PW
2P
AZ4
2PW
Code
2P
AZ 542 2P MV4 MV4S
Size
Material
S
Body material
316L SS
Code
3
4
Cv
0.29
0.5
Code
Connections
(Inlet) (Outlet)
3
Seat material
No code
VS
Material
PCTFE (Standard)
Polyimide
Code
Ports
2P
2PW
Ports
2 ports
Connection
Machined
Welded
Code
Model
542
Status
Normally closed
(N.C.)
Maximum operating pressure
125 psig
(0.9 MPa)
Code
: Only available with the same type fittings inlet and outlet.
: Inlet and outlet available with any combination of fitting type and size.
∗1) Fixed fitting (no rotating nut)
Optional portings and porting
configurations available.
Please refer to page 1114.
RoHS
Inboard leakage
Outboard leakage
Construction
1110
B
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