VIDEO:
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PART BUILDER
EXPLAINED
XVD2, High Vacuum Valve, Smooth Vent
Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).
- High vacuum valve, smooth vent
- Operating pressure: 1x10 -6 (abs) to 0.2 MPa (G)
- Operating fluid: nitrogen, air
- Valve style: normally closed
- Material: SUS316L, SUS304, FKM
How to order
Smooth Vent Valve (Supply Line)
XVD Series
RoHS
V
S
—
02XVD 2 V
In the initial state, the
sub-valve opens and the
set amount (needle
valve) is supplied slowly
into the chamber.
By switching to the main
valve circuit, the main
valve opens and the full
amount is introduced into
the chamber.
Chamber
Chamber
XVD
XVD
How to Order
Orifice size (ø3)
Smooth vent valve
Fitting size (1/4)
Fitting type
For VCR
®
For Swagelok
®
Space-saving
Valve / needle valve integrat-
ed construction – requires
only 1/4 the piping space of
previous models.
Particulates significantly re-
duced through the use of a
metal diaphragm in the
sheet portion
Flow of both initial air sup-
ply and main air supply can
be adjusted.
Introducing the full amount of supply pressure (Clean air / N2) all at once when re-
turning the vacuum chamber to the atmosphere will cause particulates to get into the
chamber. To prevent this, after slowly introducing the initial air supply and setting
the pressure, switch to the main valve circuit to supply the full amount.
Application
523
XL
XLA
XLQ
XM
XY
D-
XVD
XSA
XGT
CYV
XVD
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